Springer+Ultraclean surface processing of silicon wafers+PDF+300YYB

Title: Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing / Takeshi Hattori (ed.)
Author: Takeshi Hattori 1945-
Subjects: Semiconductor wafers -- Cleaning; Silicon -- Surfaces; Surface preparation
Publisher: Berlin ; New York : Springer
Publication Date: c1998
Description: xxviii, 616 p. : ill. ; 24 cm..
Language: English
IN/ISSN: IN3540616721

链接：http://link.springer.com//book/10.1007/978-3-662-03535-1

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