【作者】M. M. BaryshevaYu. A. VainerB. A. Gribkov 【文章标题】Investigation of superooth optical surfaces and multilayer elements using soft X-ray radiation 【期刊名，年份，卷（期），起止页*****】Technical Physics September 2013, Volume 58, Issue 9, pp 1371–1379 【全文链接】https://link.springer.com/article/10.1134/S1063784213090077