【作者】M. M. BaryshevaYu. A. VainerB. A. Gribkov 【文章标题】The evolution of roughness of superooth surfaces by ion-beam etching 【期刊名，年份，卷（期），起止页*****】Bulletin of the Russian Academy of Sciences: Physics February 2012, Volume 76, Issue 2, pp 163–167 【全文链接】https://link.springer.com/article/10.3103/S1062873812020037