| magnamite |
2017-07-10 09:37 |
【作者】B. Mainzer, K. Kelm, P. Watermeyer, M. Frieß, D. Koch
【文章标题】How to Tame the Aggressiveness of Liquid Silicon in the LSI Process
【期刊名，年份，卷（期），起止页*****】Key Engineering Materials, Vol. 742, pp. 238-245, 2017
【全文链接】 https://www.scientific.net/KEM.742.238
DOI 10.4028/www.scientific.net/KEM.742.238 |
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